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SERVOPRO NanoTrace DF-560E ULTRA

A superior quality control solution for ultra-high-purity (UHP) electronic grade gases, the DF-560E Ultra delivers an industry-best detection of 45 parts per trillion for oxygen (O2).

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SERVOPRO NanoTrace DF-560E ULTRA

The NanoTrace DF-560E ULTRA delivers industry-leading ultra-trace oxygen detection

The DF-560E ULTRA has an exceptional Lower Detection Limit (LDL) of 45 parts-per-trillion (ppt). Once the DF-560E ULTRA is measuring below 1ppb the units automatically convert to ppt providing the semiconductor industry with industry-best oxygen (O₂) measurements for quality control in ultra-high-purity (UHP) electronic grade gas.

  • High stability coulometric trace and ultra-trace measurements
  • A no-compromise solution
  • Simple maintenance and reduced ongoing costs
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